THANK YOU FOR SUBSCRIBING
Manufacturing Technology Insights | Wednesday, July 22, 2020
Microtronic, the maker of high-speed full-wafer macro defect inspection systems and software, has just announced an innovative way to automatically detect and manage wafer processing defects, beginning at the source from inside specific types of processing tools.
Fremont, CA: The new capability is known as "ProcessGuard Xtensis," which extends the power of "ProcessGuard" defect management to many process equipment in the fab. Microtronic will give "live" demonstrations of the new system at the virtual SEMICON West 2020 exhibition.
Stay ahead of the industry with exclusive feature stories on the top companies, expert insights and the latest news delivered straight to your inbox. Subscribe today.
"The key to ProcessGuard Xtensis "or PGX "is a very smart and fast new analytical software module we call the Trans-Imager," said Microtronic CEO Reiner Fenske, in the announcement.” “In real-time, Trans-Imager is able to extract and automatically analyze wafer images from within a processing tool without the need for recipes. It detects macro defects, classifies wafers, and transfers all the data into Microtronic's ProcessGuard software, which provides a rich array of additional defect management and analysis capabilities, both immediate and long-term. It extends ProcessGuard intelligence to many processes that previously had no way to detect defects."
Fenske noted that the core of ProcessGuard Xtensis is the company's well-known ProcessGuard software that is in daily use globally and has processed hundreds of millions of wafers. ProcessGuard compiles a comprehensive database of wafer defect data from the subject processing tool and enables users to analyze, organize, store and retrieve the details of every wafer run through the tool by lot, date, and time. Additionally, the ProcessGuard database can integrate notes and supplemental data from other defect inspections, microscopic analyses, and more. Everyone in the fab can quickly and easily access all of this information.
The company pointed out the importance of PGX speed and intelligence in the spotting process excursions immediately, allowing corrective actions to be taken quickly to decrease the scrap and maximize yields. The software also offers essential new reliability-enhancing control. For instance, the user can ink-out a "guard-band" safety zone around certain defects to make sure that potentially marginal die do not evade the final test and reach the customer. Previously, ProcessGuard capabilities had only been available with EagleView, Microtronic's popular macro defect inspection system. With the development of the Trans-Imager, the power of ProcessGuard can be extended to individual processing tools directly.
Trans-Imager can be linked to several types of processing equipment, like bonders, etchers, metal deposition, CMP, and more. Some of these tools might already have internal cameras that record each wafer; however, if a particular device does not have a built-in camera, Microtronic can install a camera and link it to the Trans-Imager. In addition to wafer processing equipment, the Trans-Imager can also receive images from SEMs and optical microscopes, making it easier to organize, file, store, and retrieve microscope images.
Microtronic has said that it will be installing ProcessGuard Xtensis capabilities on tools currently residing within fabs. It will also be working directly with equipment manufacturers who wish to offer PGX as an option on their new processing systems.
More in News